SL5500, Single Stage Regulator for Ultra High Purity, Low Flow

Description

Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes. - For UHP gas delivery - Flow capacity to 30 slpm - Body material: 316L SS secondary remelt - Hastelloy® internals available for corrosion resistance - Sub-atmospheric pressure delivery option