AZ1000, Single Stage Regulator, Low to Intermediate Flow w/Optional Bonnet Port

Description

Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection. - For UHP gas delivery - High inlet pressure type: max. 3500 psig (24.1MPa) - Flow capacity: standard to 30 sipm; HF (option) to 120 sipm - Body material: 316L SS - Hastelloy® internals available for corrosion resistance - Point of use and source cylinder applications